PME 5230-0

Brief

The Goal of the course is to provide senior and graduate students with the basic concepts and principles of sensing and actuation in miniaturized systems, which mostly use integrated circuit fabrication for their realization. Categories of sensors and actuators include biological transducers, mechanical transducers, etc. Basic mechanism of transduction, micro/nanofabrication techniques, and relative merits of the different technologies will be addressed. This course will be research oriented and focuses on paper survey. (Lectures will be given in English and your oral presentation will be requested in English)

Description

Course keywords: Transducers, MEMS, Microsystem, Lab on Chip, Micromachining 一、課程說明(Course Description) PME5230-Sensing and Actuation in Miniaturized Systems (微奈米系統之感測與致動) 3 Units (3 學分) Instructor: Cheng-Hsien Liu (授課老師: 劉承賢) http://mx.nthu.edu.tw/~chhsliu/transducer_new/PME5230_Liu.html Course objectives:(Lectures will be given in English and your oral presentation will be requested in English) The Goal of the course is to provide senior and graduate students with the basic concepts and principles of sensing and actuation in miniaturized systems, which mostly use integrated circuit fabrication for their realization. Categories of sensors and actuators include Mechanical, microfluidics, Lab on Chip (for biological applications) etc. Basic mechanism of transduction, micro/nanofabrication techniques, and relative merits of the different technologies will be addressed. This course will be research oriented and focuses on paper survey. 二、指定用書(Text Books) Textbook/ Required Class material: My class notes (on web downloadable files) Proceedings of Transducers (will be given on class) Proceedings of MicroTAS (will be given on class) 三、參考書籍(References) Recommended References: 1.Gregory Kovacs, "Micromachined Transducers Sourcebook," McGraw-Hill, 1998 (highly recommended) 2."Microsystems Design” by Stephen Senturia (ISBN 0-7923-7246-8) 3."Fundamentals of BioMEMS and Medical Microdevices” by Steven Saliterman (ISBN 0-8194-5977-1) 4.Mac Madau, " Fundamnetals of Microfabrication" CRC press 1998. 5."Microfluidic Cell Culture Systems," 1st Edition edited by Bettinger & Borenstein & Tao, 2012 And quite a few other MEMS related books, journal papers, conference proceeding 四、教學方式(Teaching Method) The lectures will be addressed via powerpoint files. Students are requested to get involved in class discussion.(以口頭演講方式進行, 並 以投影片輔助教學, 修課同 學被要求英文參與課堂教學討論) 五、教學進度(Syllabus, updated on http://mx.nthu.edu.tw/~chhsliu/transducer_new/PME5230_Liu.html) Topics Course Overview and Exploring Sensing and Actuation in Miniaturized Systems/Scaling Introduction to Micro/Nano Transducers and Microsystem Technology and MEMS History Micro/Nano Fabrication Techniques Miniaturized Mechanical Transducers and Microsystem Applications (I) Miniaturized Mechanical Transducers and Microsystem Applications (II) 1st Class Presentation Microfluidic Systems, BioMEMS and MEMS related NanoBio Tech. (I) Microfluidic Systems, BioMEMS and MEMS related NanoBio Tech. (II) Idea Exploring Competition (Final Project) Microfluidic Systems, BioMEMS and MEMS related NanoBio Tech. (III) Microfluidic Systems, BioMEMS and MEMS related NanoBio Tech. (IV) Class Final Presentations 六、成績考核(Evaluation) 1st Class Presentation : 30% Idea Exploring Competition : 35% Class Final Oral Presentations : 35% Discussion including Class attendance, discussion and performance: ~5 七、可連結之網頁位址 http://mx.nthu.edu.tw/~chhsliu/transducer_new/PME5230_Liu.html (will be updated through the classes)

Timetable

Scores

Average GPA 4.07

Std. Deviation 0.32

Remarks

動機系碩士班電控組及生醫系統組課程，欲加簽同學及上課連結請見課綱

Restrictions

Compulsory

Elective

Cross Discipline

First Specialization

Second Specialization